Precision Ceramics
Aluminium
Oxide
Zirconia, Zirconia Oxide, Zirconia Aluminium Oxide
Application Areas
> Dielectric Strength
> Electrical Isolation
> High Temperature Exposure
> Corrosive Environment
> Chemicals and Gases
> Thermal Shock
> Liquid and Gas Impermeable
> Thermal Expansion Match
> ESD Safe Applications
Typical Materials
> Aluminium Oxide (Al2O3)
> Aluminium Nitride (AlN)
> Zirconia, Zirconia Oxide and Zirconia Toughened
Aluminium Oxide
> ESD Safe Zirconia Oxide (Cerastat – Proprietary
Product of Saint Gobain)
Typical Grades
> Product Types – Sputtering Targets, Wafers
Processing / Handling and Semiconductors
> Typical Purities – 85%, 90%, 94%, 96%, 98.5%,
99.5%, 99.8%, 99.9% and 99.99%
Typical Properties
> Controlled Microstructures
/ High Purities / High Uniformity
> High Tolerances Control / Machined and Polished
/ Near Net Shape Processing
> Low Particles Generation
Cerastat
ESD Safe Zirconia Oxide
Cerastat ESD Safe Ceramics
Cerastat ESD Safer Ceramics are engineering
ceramic materials which are Electro-Static Discharge
Safe and used in electronics industries in the areas
of process toolings and product components.
Typical Characteristics
/ Usefulness of Cerastat ESD Safe Ceramics
| Characteristics |
Usefulness |
| High Mechanical Strength |
Strong Handling Capability |
|
Sub-micron grain size |
Small features machinability |
| Greater than 99.8% Theoretical
Density |
No porosities / Low particles
generation |
|
Black or Light Colours |
Compatible with multiple
optical systems |
| Non-magnetic or magnetic
as required |
Suitable for new generation
devices |
|
Variable resistivity |
Expedient delivery / Low
cost manufacture |
No degassing |
Suitable for clean-room |
|
High chemical corrosion resistance
|
Suitable for vacuum environment
|
Typical Cerastat ESD Safe
Ceramics Properties
| Properties |
Measurement
Units |
Typical
Data / Testing Standard |
Density |
gms/ cm3 |
6 / ASTM-C20 |
| Colour |
L
(resistivity dependent) |
0-80
Black ~ Light Colour / ASTM-E308 |
Water Absorption |
% Per Cent |
0 / ASTM-C373 |
| Flexural
Strength |
MPa |
900 / ASTM-C1161 |
Elastic Modulus |
GPa |
192 / Pulse-echo |
| Hardness |
GPa |
9.2
/ Vickers 10 kgf |
Fracture Toughness |
MPa / m1/2 |
4.7 / Indentation
strength |
| Thermal
Conductivity |
W/m-K |
5
/ ASTM-C408 |
Coefficient
of Thermal Expansion |
1x10-6
/ C |
9.5 / ASTM-C372 |
| Volume
Resistivity |
ohm-cm |
Varies 103 ~ 1012 / ASTM-C257
|
|
